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Nov 23, 2024
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University Catalog 2015-2016 [ARCHIVED CATALOG]
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ELEN 437: Fund of Microfabrication Process3 Semester Credit Hours MATH 245 and PHYS 202 . Study of microfabrication processes including patterning, additive, and etching processes used for the realization of microelectronic ultra large scale integration (ULSI) and microelectromechanical systems (MEMS) technologies.
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