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Jan 15, 2025
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University Catalog 2021-2022 [ARCHIVED CATALOG]
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MSE 402: Micro/Nanoelectromechanical Systems3 Semester Credit Hours . 0-3-3 Prerequisite ELEN 334 Physical, mechanical, chemical, and electrical operation principles of microelectromechanical systems (MEMS). Actuation, engineering design and fabrication economics of MEMS devices. Introduction to nanoelectromechanical systems (NEMS).
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