May 20, 2024  
University Catalog 2023-2024 
    
University Catalog 2023-2024 [ARCHIVED CATALOG]

MSE 402: Micro/Nanoelectromechanical Systems

3 Semester Credit Hours . 0-3-3 Prerequisite ELEN 334   Physical, mechanical, chemical, and electrical operation principles of microelectromechanical systems (MEMS).  Actuation, engineering design and fabrication economics of MEMS devices.  Introduction to nanoelectromechanical systems (NEMS).