Jun 20, 2024  
University Catalog 2023-2024 
    
University Catalog 2023-2024 [ARCHIVED CATALOG]

MSE 501: Fundamentals of Microfabrication Processes

3 Semester Credit Hours . 0-3-3 Study of microfabrication processes including patterning, additive, and etching processes used for the realization of microelectronic ultra large-scale integration (ULSI) and microelectromechanical systems (MEMS) technologies.