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University Catalog 2026-2027

MSE 5013: Fundamentals of Microfabrication Processes

3 Semester Credit Hours . 0-3-3 Study of microfabrication processes including patterning, additive, and etching processes used for the realization of microelectronic ultra large-scale integration (ULSI) and microelectromechanical systems (MEMS) technologies.