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Dec 07, 2025
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University Catalog 2025-2026 [ARCHIVED CATALOG]
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MSE 5013: Fundamentals of Microfabrication Processes3 Semester Credit Hours . 0-3-3 Study of microfabrication processes including patterning, additive, and etching processes used for the realization of microelectronic ultra large-scale integration (ULSI) and microelectromechanical systems (MEMS) technologies.
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