Jan 30, 2025  
University Catalog 2025-2026 
    
University Catalog 2025-2026

ELEN 437: Fund of Microfabrication Process

3 Semester Credit Hours . 0-3-3 Prerequisite MATH 245  and PHYS 202 . Study of microfabrication processes including patterning, additive, and etching processes used for the realization of microelectronic ultra large scale integration (ULSI) and microelectromechanical systems (MEMS) technologies.